TPoD stands for Thin-film Piezoelectric-on-Diamond. TPoD resonators are lateral-extensional resonators that incorporate a piezoelectric layer. By applying an electric field through the top and bottom electrodes, a stress field is generated in the bulk of the resonator causing it to vibrate laterally. The frequency of vibrations depends on the geometry of the resonator, as well as the elastic properties of the structure.

The superior adventage of diamond is the highest Young's modulus among all materials, so higher frequencies can be achieved without having to reduce the feature sizes. This project focuses on design and optimization of such high frequency resonators.

5th order tpod resonator

Structure of a 5th order TPoD resonator

 

5th order resonator-mode shape

5th over-tone of the strain filed in a TPoD resonator